MICRO-e Sem 1 Jan 26 Session 20252026

This course is aimed to provide fundamentals of microelectromechanical systems (MEMS) technologies including physical principles, microfabrication processes, device analysis and design and applications of microsensors and microactuators. The course will begin with an overview of MEMS devices and the processes that are used to fabricate them. The basic governing equations for MEMS devices in different energy domains (mechanical, electrical, optical, thermal and fluidic) will be reviewed. Students will then work in teams to design and layout a MEMS device.

This course emphasizes on numerical methods and computer program applications to solve problems. Statistical analysis methods that can be programmed in computers will also be taught. It is anticipated that students will learn about different approaches to solve engineering problems and be able to identify the ones that best applied to any given problem. The course is designed and implemented to help students apply open education technology including open educational resources (OER) and Web 2.0 to foster a lifelong learning culture.

This course introduces the materials, physical characteristics, working principles, and applications of advanced nanoelectronic devices. The fundamental physics of current controls in nano-scale devices will be studied, starting from bulk to 2-D, 1-D, and 0-D materials covering graphene, carbon nanotubes, nanowires, and quantum dots. The working principles of advanced devices that include resonant tunneling devices, Coulomb blockades, high-mobility transistors and sensors will also be discussed. Finally, the potential future applications of nanoelectronic devices will be explored.